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LM Guide Stage
Gantry, Hybrid, Cross Types
- Sub-micron level high precision stages with multi heads & multi axis control
- Z axis available (optional)
- Standard and custom design available
- Expanded work area : 2,300mm x 5,000mm
- Applications : Production equipment for FPD, PCB, semiconductor & electronic components
Air Bearing Stages
Gantry, Hybrid, Cross Types
- Nano class high precision stages
- High acceleration/ deceleration & Low speed ripple
- Standard & custom design available
- Full flexibility in dimension from small to large
- Z axis available (Optional)
- Applications : Production equipment for FPD, PCB, semiconductor & Electronic components
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