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Key Technologies
Production Technologies
Basic Technologies
  • Generation of position feedback signals &
    synchronized signals for motor, controller and
    trigger module

  • Automated design by developing parametric
    design tool

  • Motion algorithm suppressing
    residual vibration

  • 11th generation very
    large motion stage

  • Motion controller & servo driver working
    with EtherCAT/MACRO/Mechatrolink3

  • Direct-PWM

  • Light weight/high stiff materials