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리니어모터

Customized Linear Motors

미니스테이지(JSAH)
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Description
- 분해능 : 0.1㎛ / 0.5㎛ / 1㎛
- 이동거리 : 20mm ~ 120mm
- 반도체, 광학 부품 제조 설비에 응용
- 정지시 떨림(50nm이하), 빠른 응답성
- 리니어 엔코더를 Full closed-loop 제어하여 backlash 최소화
- 돌출부 없는 콤팩트 디자인으로 공간 효율 설계
Specification
Model
JSAH20
JSAH40
JSAH60
JSAH80
JSAH100
JSAH120
Performance Parameters
Units
Normal Load Capacity
kg
5
5
5
5
5
5
Average Acceleration *Note1
m/sec²
2.5
2.5
2.5
2.5
2.5
2.5
Max Velocity *Note1
m/sec
0.2
0.3
0.35
0.4
0.5
0.55
Straightness
3
3
3
3
4
4
Flatness
6
6
8
8
10
10
Positional Accuracy *Note2
3
3
4
4
5
5
Bi-directional Repeatability *Note2
±1
±1
±1
±1
±1
±1
Total Weight
kg
1.8
2
2.2
2.4
2.6
2.8
Mover Weight
kg
0.7
0.8
1.0
1.1
1.3
1.4
    Measured at the mover center with no load (Temp. 20±2˚C).
    *Note1 : Encoder resolution : 1um     *Note2 : Encoder resolution : 0.1um
    ※ Acceleration, Velocity, Accuracy, Repeatability depend upon encoder resolution