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에어베어링 스테이지
Gen. 4 XYZ Ceramic Air Bearing Gantry Stage
Gen. 5.5 XYT 평면(Planar)Air Bearing Stage
XY 평면(Co-planar) Air Bearing Stage
XYZP 수직 Ceramic Air Bearing Stage
Gen. 6 Planar Air Bearing Stage
Gen. 7.5 Air Bearing Stage
Gen. 4.5 Hybrid Air Bearing Stage
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